Ion Beams for Materials Analysis

Blocking: Reduction of detector signal rate when aligned with a crystal axis or plane. Channeling: Guided trajectory of incident ions between crystal axes or planes. Collision cascade: Series of atom-atom collisions initiated by an ion-atom collision. Cross section: Effective area presented by each atom or nucleus for a specific type of interaction with an incoming ion. lmplantation: Addition of controlled concentration of atoms to a nearsurface layer by irradiation with a known dose of incident ions. Shadowing: Reduction in probability of ion interactions with atoms that lie behind a surface atom in the direction of the incident ion beam. Sputter profiling: Determination of variation in isotope concentrations with depth by analysis as a function of time during sputtering. Sputtering: Emission of atoms or ions following a collision of an energetic ion with surface atoms. Stopping power: Rate of energy loss of incident ion as it penetrates below the surface of a sample.